SFM30xx Series Digital Mass Flow Meters
Sensirion's SFM30xx series digital mass flow meters offer features for measuring flows of air, oxygen, and mixtures of air and oxygen
Sensirion’s SFM30xx are versatile, low pressure drop, bidirectional flow meters. The SFM3003 is based on the same form factor as the proven SFM3000 series but comes with a larger flow range of up to 300 slm and offers additional features for measuring air, oxygen, and mixtures of air and oxygen. The SFM3003 series is the ideal choice for medical and industrial applications. The SFM3013 is based on the SFM3003 solution but offers superior stability against overpressure. The SFM3013 can be calibrated for Heliox gas mixtures as an option.
- Flow range up to 300 slm
- Calibrated for O2, air, and mixtures (Heliox available in option for SFM3013)
- Low pressure drops across the sensor
- I2C interface
- No recalibration needed
- Up to 1 bar gauge pressure (SFM3013)
- Bidirectional option up to -150 slm (SFM3003)
- High reliability and long-term stability
- Excellent signal-to-noise ratio
- Industry-proven technology with a track record of more than 15 years
- Designed for mass production
- High process capability
- Scalability
SFM3003 Series Digital Mass Flow Meters
| Image | Manufacturer Part Number | Description | Available Quantity | Price | View Details | |
|---|---|---|---|---|---|---|
![]() | ![]() | SFM3003-300-CE | DIGITAL (MASS) FLOW METER -150SL | 0 - Immediate | $95.58 | View Details |
![]() | ![]() | SFM3003-300-CL | DIGITAL (MASS) FLOW METER -30SLM | 37 - Immediate | $95.58 | View Details |
![]() | ![]() | SFM3003-300-CET | DIGITAL GAS FLOW AND TEMP SENSOR | 23 - Immediate | $108.13 | View Details |
SFM3013 Series Digital Mass Flow Meters
| Image | Manufacturer Part Number | Description | Available Quantity | Price | View Details | |
|---|---|---|---|---|---|---|
![]() | ![]() | SFM3013-300-CL | DIGITAL (MASS) FLOW METER -30SLM | 26 - Immediate | $109.96 | View Details |
![]() | ![]() | SFM3013-300-CLM | DIGITAL (MASS) FLOW METER -30SLM | 0 - Immediate | $153.94 | View Details |
SFM3003 Eval Kit
| Image | Manufacturer Part Number | Description | Available Quantity | Price | View Details | |
|---|---|---|---|---|---|---|
![]() | ![]() | SEK-SFM3003-300-CL | SFM3003 EVAL KIT | 7 - Immediate | $118.34 | View Details |
SFM3013 Eval Kit
| Image | Manufacturer Part Number | Description | Available Quantity | Price | View Details | |
|---|---|---|---|---|---|---|
![]() | ![]() | SEK-SFM3013-300-CL | SFM3013 EVAL KIT | 3 - Immediate | $123.44 | View Details |








